Introduction

Founded in April, 2007 Established Shanghai Guanghan Vaccum Technology Co., Ltd. & Be SEMI member in 2009 Passed ISO9001 & ISO14001 in 2011。 Identified as Shanghai high-tech enterprises in 2012 Established Shanghai Sheen Microeletronics Equipment Technology Co.,Ltd. in 2013 Established Sichuan Vast Microeletronics Co.,Ltd. in 2013 Provide equipment total solution for semiconductor production line; Services in 2,3,4,5,6,8-inch semiconductor production line Specialize in Litho, Implant, Thin Film, Etch and Diff 4,000 ㎡refurbished area ，1000㎡ clean room Ex-stock for litho、implant 、PVD etc. A large stock of spare parts are available 46 professional engineers, over 70 staff